00466nam a2200157 4500 160402b xxu||||| |||| 00| 0 eng d 9780521764834 D66 Jones, Thomas B. Electromechanics and MEMS / Thomas B. Jones and Nenad G. Nenadic. Cambridge : Cambridge University Press, c2013. Microelectromechanical systems Nenadic, Nenad G. ddc BK 232 232 0 0 0 0 GEN LIB LIB 2016-04-02 10 2 D66 Q3 422124 2023-08-22 2023-07-22 5531.99 2016-04-02 BK