Jones, Thomas B. <br/><br/>
Electromechanics and MEMS /  
Thomas B. Jones and Nenad G. Nenadic. 
 - Cambridge :  Cambridge University Press,  c2013. 
<br/><br/><label>ISBN: </label>9780521764834 
<br/><br/><label>Subjects--Index Terms: </label>Microelectromechanical systems