TY  - BOOK
AU  - Makabe, T.
AU  - Petrovic, Z.
TI  - Plasma electronics: applications in microelectronic device fabrication 
SN  - 0750309768
PY  - 2006///
CY  - New York
PB  - Taylor & Francis
KW  - Plasma Electronics
KW  - Plasma Physics
ER  -