Makabe, T. <br/><br/>
Plasma electronics:  applications in microelectronic device fabrication / 
by T. Makabe and Z. Petrovic 
 - New York :  Taylor & Francis,  2006. 
<br/><br/><label>ISBN: </label>0750309768 
<br/><br/><label>Subjects--Index Terms: </label>Plasma Electronics Plasma Physics